Central Glass began mass production of CEG® 39A, an etching gas used in the manufacturing processes of increasingly miniaturized advanced semiconductors (2nm node and beyond) at our Ube Plant (Ube City, Yamaguchi Prefecture) , and also started full-scale sales for logic semiconductors in December 2024.

The structures of advanced semiconductors are becoming increasingly miniaturized and evolving into more complex three-dimensional architectures. Central Glass’s newly developed CEG® 39A is an etching gas compatible with the gate-all-around (GAA) transistor structure used in the 2nm node and beyond. Due to etching selectivity more than five times higher than conventional gases, it offers excellent precision control for etching and over twice the processing speed. It also has a global warming potential (GWP) of zero and is PFAS-free, which significantly reduces environmental impact.

Moving forward, Central Glass will continue to develop and propose innovative solutions that respond precisely to changes in transistor structures, such as GAA and CFET (Complementary Field-Effect Transistor), associated with semiconductor miniaturization, as well as to customer and environmental needs. In this way, we aim to contribute to technological advancements in the semiconductor industry and the realization of a sustainable society.

Contact Information

Central Glass Co., Ltd. 
Electronic Materials Sales Department 
Phone: +81-3-3259-7226