Products
Semiconductors
Electronic Materials
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CVD Process Gases for Semiconductors
We are commercializing tungsten hexafluoride (WF₆) which is used to mold metal wiring and trimethylsilane (3MS) which is used to form low-k dielectric constant interlayer insulating coating.
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Cleaning Gases for Semiconductors Manufacturing Equipment
Since completing a multi-purpose manufacturing facility for high-purity fluorine gases in 1988, we have consolidated our position as a major supplier of chlorine trifluoride (ClF₃) and other cleaning gases for semiconductors manufacturing equipment.
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Etching Gases for Next Generation Semiconductors
CEG® is the brand name for Central Glass' innovative process gases for semiconductors. In the CEG® Series, we have commercialized various process gases that have a lower environmental impact than existing gases and are suitable for 3D devices and cutting-edge materials.
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Photoresist Materials
We supply a variety of fluorine-containing monomers and polymers.
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Other Fluorine Products
Unique fluorine resins and fluorine compound products.
Contact
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