Products
Cleaning Gases for Semiconductors Manufacturing Equipment
Since completing a multi-purpose manufacturing facility for high-purity fluorine gases in 1988, we have consolidated our position as a major supplier of chlorine trifluoride (ClF₃) and other cleaning gases for semiconductors manufacturing equipment.
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ClF₃
The product is used as a LP-CVD chamber cleaning gas targeting TiN and W.
Purity | 99.9% or more |
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Applications
- LP-CVD chamber cleaning gas
20% F2/N2
The product is used as a LP-CVD chamber cleaning gas targeting Si.
Purity |
F2: 99.9% or more N2: 99.999% or more |
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Applications
- LP-CVD chamber cleaning gas
High purity anhydrous hydrofluoric acid (HF)
The product is used as a LP-CVD chamber high performance cleaning gas targeting SiO2.
Purity |
99.999% or more |
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Applications
- Etching gas, LP-CVD chamber and exhaust pipe cleaning gas
Electronic Materials Related Products
Electronic Materials Related Research and Development
Contact
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Electronic Materials Sales Department
Business hours: 9:00 a.m. - 5:30 p.m.
※Except Saturdays, Sundays, public holidays, August 15, and seasonal holiday periods.
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Applied Chemicals
We provide basic materials to many industries, such as polyaluminum chloride used as a water treatment agent and rigid urethane blowing agents that do not damage the ozone layer.
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Medi-Chemicals
The Group has a long history of providing products for pharmaceuticals and medical devices, and we place great emphasis on safety and quality control. We are developing new materials that contribute to improving quality of life.
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Electronic Materials
We are actively developing materials, with a focus on gases for a wide range of semiconductor processes and photoresist resin materials.
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Energy Materials
We develop electrolytes and additives for lithium-ion batteries used in electric vehicles and storage batteries. The Central Glass Group provides a stable supply to our customers worldwide from our multiple overseas manufacturing bases.
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Fertilizers
We manufacture various types of fertilizers, such as rice paddy fertilizers, based on nitrogen, phosphorus, and potassium, which are considered to be the three components of fertilizers.
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Architectural Glass
We offer products that are healthy, safe, comfortable, and environmentally friendly, such as Eco-Glass, which is effective in improving indoor heating and cooling efficiency, and security glass, to prevent break-ins and theft.
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Automotive Glass
We are also involved in the eco field to make vehicle interior spaces more comfortable, and we provide high-quality and diverse glass products that contribute to safety, comfort, and design.
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Glass Fiber
Both continuous glass fiber and glass wool are employed in the automotive, environmental, and other fields.