Products
Etching Gases for Next Generation Semiconductors
CEG® is the brand name for Central Glass' innovative process gases for semiconductors.
In the CEG® Series, we have commercialized various process gases that have a lower environmental impact than existing gases and are suitable for 3D devices and cutting-edge materials.
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CEG® ClF3
ClF3, which has until now been used as a cleaning gas, has been customized to high purity for use as an etching gas.
| Purity | 99.99% or more |
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Applications
- Etching for cutting-edge devices
CEG® 34E
Compared to existing etching gases (C4F6, C4F8, etc.), CEG®34E can etch SiO2 or SiN films with high selectivity against mask materials such as amorphous carbon.
| Purity | 99.99% or more |
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Applications
- 3D-NAND SiO2/SiN multilayer etching
- SiO2 or SiN film deep etching
- Removal of SiN sacrificial layer
CEG® 16N
When used as an additive gas during etching, it can greatly improve the selectivity of SiO2 film for mask materials such as amorphous carbon compared to existing etching gases (C4F6, C4F8, etc.).
| Purity | 99.99% or more |
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Applications
- 3D-NAND SiO2/SiN multilayer etching
- SiO2 film deep etching
CEG® 31Y
Highly selective etching of SiO2 film is possible for mask materials such as amorphous carbon. It is also possible to improve the morphology of the mask material by using it as an additive gas during etching.
| Purity | 99.99% or more |
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Applications
- SiO2 film deep etching
- Improves morphology of mask material during etching
CEG® IF7
It is possible to etch silicon films with high selectivity compared to SiO2 and SiN films.
| Purity | 99.95% or more |
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Applications
- Removal of Poly-Si dummy gate
- Removal of Si hard mask
- Si sacrificial layer etching
Ultra high purity anhydrous hydrofluoric acid (HF)
This product is a customized version of high purity anhydrous hydrofluoric acid (HF), which has so far been used as a cleaning gas, for use as an etching gas.
20％F2/ Ar
This is a next-generation environmentally friendly etching gas. Compared to existing NF3 and CF-based gases, the environmental impact can be reduced.
Electronic Materials Related Products
Electronic Materials Related Research and Development
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Electronic Materials Sales Department
Business hours: 9:00 a.m. - 5:30 p.m.
※Except Saturdays, Sundays, public holidays, August 15, and seasonal holiday periods.
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Applied Chemicals
We provide basic materials to many industries, such as polyaluminum chloride used as a water treatment agent and rigid urethane blowing agents that do not damage the ozone layer.
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Medi-Chemicals
The Group has a long history of providing products for pharmaceuticals and medical devices, and we place great emphasis on safety and quality control. We are developing new materials that contribute to improving quality of life.
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Electronic Materials
We are actively developing materials, with a focus on gases for a wide range of semiconductor processes and photoresist resin materials.
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Energy Materials
We develop electrolytes and additives for lithium-ion batteries used in electric vehicles and storage batteries. The Central Glass Group provides a stable supply to our customers worldwide from our multiple overseas manufacturing bases.
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Fertilizers
We manufacture various types of fertilizers, such as rice paddy fertilizers, based on nitrogen, phosphorus, and potassium, which are considered to be the three components of fertilizers.
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Architectural Glass
We offer products that are healthy, safe, comfortable, and environmentally friendly, such as Eco-Glass, which is effective in improving indoor heating and cooling efficiency, and security glass, to prevent break-ins and theft.
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Automotive Glass
We are also involved in the eco field to make vehicle interior spaces more comfortable, and we provide high-quality and diverse glass products that contribute to safety, comfort, and design.
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Glass Fiber
Both continuous glass fiber and glass wool are employed in the automotive, environmental, and other fields.