Many materials used in semiconductor manufacturing processes contain PFAS (perfluoroalkyl and polyfluoroalkyl substances), which have raised environmental concerns and given rise to growing demand for new materials that do not use PFAS. 
To meet these demands, Central Glass Co., Ltd. has focused on developing environmentally friendly materials. We have now successfully developed PFAS-free formulations for both photoacid generators and the water-repellent polymers used in ArF immersion resists. Leveraging these advancements, we aim to develop and commercialize PFAS-free ArF immersion resists.
In October 2024, we signed a joint development agreement with imec, a globally renowned research institute in the area of semiconductor processes. This partnership will further accelerate our development of PFAS-free ArF immersion resists.
We plan to present our results and future plans for the development in collaboration with imec at SPIE Advanced Lithography + Patterning, one of the world’s largest international symposia in the field of photolithography, held in San Jose, California, USA, from February 23 to 27, 2025.

Presentation Title: PFAS free materials and resist for ArF immersion photolithography
SPIE Website: SPIE Advanced Lithography + Patterning

Since 2017, we have collaborated with imec on the joint development of wafer cleaning chemicals with an early focus on developing PFAS-free products. This relationship has led to the recent joint development agreement on PFAS-free ArF immersion resists and our participation in the Sustainable Semiconductor Technologies and Systems (SSTS) program.
The SSTS program supports efforts to reduce the environmental impact of the entire semiconductor value chain. Many fabless companies, fabs, equipment manufacturers, and material suppliers throughput the semiconductor supply chain are members of the program, and we are working with them to reduce the industry's CO₂ emissions, explore and evaluate PFAS alternatives, and stimulate collaboration through the SSTS network.

The synergy between Central Glass, with our expertise in PFAS-free technologies, and imec, a leader in semiconductor technology development, will accelerate development, and continue to contribute to the innovation in the semiconductor industry and the realization of a sustainable society.

Contact Information

Central Glass Co., Ltd. 
Electronic Materials Sales Department 
Phone: +81-3-3259-7226